Characterization in Silicon Processing (Materials Characterization) by: Yale Strausser, C. R. Brundle, Gary E. McGuire
Category: Technical
Tag: Science/Engineering
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Description
Characterization in Silicon Processing (Materials Characterization) by: Yale Strausser, C. R. Brundle, Gary E. McGuire
Publisher: Butterworth-Heinemann | ISBN: 0750691727 | 1993-10 | Pages: 240 | PDF | 12.5 MB
Publisher: Butterworth-Heinemann | ISBN: 0750691727 | 1993-10 | Pages: 240 | PDF | 12.5 MB
Contents
Application of Materials Characterization Polysilicon Conductors
Techniques to Silicon Epitaxial Growth
Silicides
Aluminum- and Copper-Based Conductors
Tungsten-Based Conductors
Barrier Films
Appendix: Technique Summaries
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