Handbook of Silicon Semiconductor Metrology

Description

Handbook of Silicon Semiconductor Metrology

 

Handbook of Silicon Semiconductor Metrology
By: Alain C. Diebold(Editor)
ISBN-10: 0824705068    ISBN-13: 9780824705060
Publisher: CRC - 2001-06-29
Hardcover | 896 Pages

 

Editorial Review:

 

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

 

Table of Contents:
 

  Preface  
  Acknowledgments  
  Contributors  
1 Silicon Semiconductor Metrology 1
2 Gate Dielectric Metrology 17
3 Metrology for Ion Implantation 49
4 MOS Device Characterization 59
5 Carrier Illumination Characterization of Ultra-Shallow Implants 97
6 Modeling of Statistical Manufacturing Sensitivity and of Process Control and Metrology Requirements for a 0.18-[mu]m NMOSFET 117
7 Overview of Metrology for On-Chip Interconnect 143
8 Metrology for On-Chip Interconnect Dielectrics 149
9 Thin-Film Metrology Using Impulsive Stimulated Thermal Scattering (ISTS) 167
10 Metal Interconnect Process Control Using Picosecond Ultrasonics 197
11 Sheet Resistance Measurements of Interconnect Films 215
12 Characterization of Low-Dielectric Constant Materials 245
13 High-Resolution Profilometry for CMP and Etch Metrology 279
14 Critical-Dimension Metrology and the Scanning Electron Microscope 295
15 Scanned Probe Microscope Dimensional Metrology 335
16 Electrical CD Metrology and Related Reference Materials 377
17 Metrology of Image Placement 411
18 Scatterometry for Semiconductor Metrology 477
19 Unpatterned Wafer Defect Detection 515
20 Particle and Defect Characterization 547
21 Calibration of Particle Detection Systems 583
22 In Situ Metrology 601
23 Metrology Data Management and Information Systems 679
24 Statistical Metrology, with Applications to Interconnect and Yield Modeling 705
25 Physics of Optical Metrology of Silicon-Based Semiconductor Devices 723
26 Ultraviolet, Vacuum Ultraviolet, and Extreme Ultraviolet Spectroscopic Reflectometry and Ellipsometry 761
27 Analysis of Thin-Layer Structures by X-Ray Reflectometry 789
28 Ion Beam Methods 811
29 Electron Microscopy-Based Measurement of Feature Thickness and Calibration of Reference Materials 851
30 Status of Lithography Metrology as of the End of 2000 865
  Index 869
 

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