Handbook of Sputter Deposition Technology: Principles, Technology and Applications
ISBN: 0815512805
Category: Technical
Tag: Science/Engineering
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Description
Kiyotaka Wasa, Shigeru Haber, "Handbook of Sputter Deposition Technology: Principles, Technology and Applications"
William Andrew | 1993 | ISBN: 0815512805 | 316 pages | PDF | 9,6 MB
William Andrew | 1993 | ISBN: 0815512805 | 316 pages | PDF | 9,6 MB
Review
"acomprehensively covers state-of-the-art sputtering techniques and equipmentathoroughly addresses all fundamental aspects." - Materials and Processing Report
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