Micro Electro Mechanical System Design (Mechanical...

Description

Title: Micro Electro Mechanical System Design (Mechanical Engineering)
Description:
Pages: 496

Micro Electro Mechanical System Design presents a unified treatment of all micro electro mechanical

system (MEMS) design procedures. The author focuses on the complete process required for designing and

developing MEMS. Instead of focusing on only the detailed engineering and physics underlying a MEMS

device, such as a gyroscope or fluidic device, this book looks at the entire process that a MEMS

design engineer must consider in order to make informed technical decisions. The chapters answer

important questions such as: What fabrication process do I use? Will this design approach produce a

device that can be reliable and have a good yield? What are the packaging and assembly requirements?

Links

http://linkgrabber.blogspot.com/2006/11/micro-electro-mechanical-system-design.html

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