Micro Electro Mechanical System Design (Mechanical...
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Description
Title: Micro Electro Mechanical System Design (Mechanical Engineering)
Description:
Pages: 496
Micro Electro Mechanical System Design presents a unified treatment of all micro electro mechanical
system (MEMS) design procedures. The author focuses on the complete process required for designing and
developing MEMS. Instead of focusing on only the detailed engineering and physics underlying a MEMS
device, such as a gyroscope or fluidic device, this book looks at the entire process that a MEMS
design engineer must consider in order to make informed technical decisions. The chapters answer
important questions such as: What fabrication process do I use? Will this design approach produce a
device that can be reliable and have a good yield? What are the packaging and assembly requirements?
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