Microfabrication and Nanomanufacturing

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Title: Microfabrication and Nanomanufacturing
Description:
Pages: 401

With increased activity in nanotechnology driven by economic necessity, this book focuses on

the technology of fabrication and manufacturing of engineering materials at the micro- and

nanoscale. The text describes the construction of microscale components using lithographic

techniques, providing examples of LiGA and deep x-ray lithography. It presents bulk and

micromachining procedures used for producing features, manufacturing methods such as ejection

molding, and the processes used to fabricate master molds for subsequent operations. Additional

material introduces new concepts including the deposition of thin solid films onto the surfaces

of special tools and pulsed water drop machining.

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