Microfabrication and Nanomanufacturing
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Description
Title: Microfabrication and Nanomanufacturing
Description:
Pages: 401
With increased activity in nanotechnology driven by economic necessity, this book focuses on
the technology of fabrication and manufacturing of engineering materials at the micro- and
nanoscale. The text describes the construction of microscale components using lithographic
techniques, providing examples of LiGA and deep x-ray lithography. It presents bulk and
micromachining procedures used for producing features, manufacturing methods such as ejection
molding, and the processes used to fabricate master molds for subsequent operations. Additional
material introduces new concepts including the deposition of thin solid films onto the surfaces
of special tools and pulsed water drop machining.
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