Optical Diagnostics for Thin Film Processing by Irving P. Herman

Description

"The greatest value of Optical Diagnostics for Thin Film Processing is a comprehensive reference text. I highly recommend it to anyone who wants to seriously delve into the field of thin film optical diagnostics or wants a single source book of well-organized and very high-density information on this subject."

Thin film processing techniques are widely used in many types of manufacturing. Clearly, they are central to fabrication in microelectronics, an area that has grown tremendously in recent decades. With the ever-increasing complexity of film fabrication procedures has come the realization that it is important to understand the science underlying many film processing steps and to be able to monitor and control the course of crucial steps. In situ diagnostics are needed to achieve either aim.

Optical-based diagnostics probably affect thin film processing activities in more ways than any other type of diagnostic technique. In fact, there has been explosive growth in the use of optical diagnostics in recent years, particularly in their application to manufacturing, and there is every indication that this very strong growth will continue in the future. This book presents the optical spectroscopies and related optical techniques that are used as real-time diagnostics during the processing of thin films. Although it is limited to diagnostics that use photons, which might seem to be unduly restrictive, this book demonstrates the amazingly wide diversity of applications of optical probes. This diversity is a testimony to the power and versatility of optical diagnostics.

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