Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies

Description

"Silicon Devices and Process Integration" is compiled from industrial and academic lecture notes and reflects years of experience in the development of silicon devices. It is prepared specifically for engineers and scientists in semiconductor research, development and manufacturing. It is also suitable for a one-semester course in electrical engineering and materials science at the upper undergraduate or lower graduate level. The book covers both the theoretical and practical aspects of modern silicon devices and the relationship between their electrical properties and processing conditions.
Topics covered include: MOS structure, parameter extraction - Short and narrow-channel effects - CMOS mobility enhancement techniques - High-K gate dielectrics, advanced gate stacks - Low-K dielectrics and Cu interconnects - Analog devices and passive components - CMOS and BiCMOS process integration - DRAM, SRAM and NVM cell structures.
The book covers state-of-the-art silicon devices and integrated process technologies. It represents a comprehensive discussion of modern silicon devices, their characteristics, and interactions with process parameters.





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1. Ebooks list page : 2175
2. Silicon Processing for the VLSI Era, Vol. 4: Deep-Submicron Process Technology
3. Silicon Processing for the VLSI Era, Vol. 2: Process Integration
4. Deep-Submicron CMOS ICs - From Basics to ASICs
5. All-Digital Frequency Synthesizer in Deep-Submicron CMOS
6. All-Digital Frequency Synthesizer in Deep-Submicron CMOS
7. [request_ebook] Deep-Submicron Cmos Ics: From Basics to Asics
8. Silicon Quantum Integrated Circuits: Silicon-Germanium Heterostructure Devices: Basics and Realisations
9. Into The Nano Era: Moore's Law Beyond Planar Silicon CMOS
10. CMOS SRAM Circuit Design and Parametric Test in Nano-Scaled Technologies: Process-Aware SRAM Design and Test
11. Embedded Memories for Nano-Scale VLSIs
12. Design for Manufacturability and Yield for Nano-Scale CMOS
13. Silicon Heterostructure Devices
14. Fluid Properties at Nano/Meso Scale: A Numerical Treatment
15. Fluid Properties at Nano/Meso Scale: A Numerical Treatment
16. Physics And Modeling Of Tera- And Nano-Devices