The MEMS Handbook

Description

Microelectromechanical systems (MEMS)-tiny machines between one millimeter and one micron long-are finding increasing application in a variety of industrial and medical fields and have a potential worldwide market in the billions of dollars. This handbook explores various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. It will be indispensible as a reference for both experienced and graduate student scientists and engineers.



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