X-Ray Metrology in Semiconductor Manufacturing

Description

The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.

Disclaimer:
Contents of this page are indexed from the Internet. All actions are under your responsability. Email us to report illegal contents or external links and we'll remove them immediately.

Please check the description for download links if any or do a search to find alternative books.

Can't Download?
Please search mirrors if you can't find download links for "X-Ray Metrology in Semiconductor Manufacturing" in "Description" and someone else may update the links. Check the comments when back to find any updates.

Search Mirrors
Maybe some mirror pages will be helpful, search this book at top of this page or click here to find more info.

1. Ebooks list page : 2567
2. X-Ray Metrology in Semiconductor Manufacturing
3. X-Ray Metrology in Semiconductor
4. Handbook of Silicon Semiconductor Metrology
5. Handbook of Silicon Semiconductor Metrology
6. Semiconductor Manufacturing Handbook
7. Run-to-Run Control in Semiconductor Manufacturing
8. Fundamentals of Semiconductor Manufacturing and Process Control
9. Handbook of Semiconductor Manufacturing Technology, Second Edition
10. Handbook of Semiconductor Manufacturing Technology (Repost)
11. Fundamentals of Semiconductor Manufacturing and Process Control(Repost)
12. Fundamentals of Semiconductor Manufacturing and Process Control by Gary S. May
13. Fundamentals of Semiconductor Manufacturing and Process Control by Gary S. May (Repost)
14. Semiconductor Safety Handbook: Safety and Health in the Semiconductor Industry (Semiconductor Safety Series): Richard A. Bolmen
15. Semiconductor Nanostructures for Optoelectronic Applications (Artech House Semiconductor Materials and Devices Library)
16. Optical Metrology